AI MODULE
AI Module
Cyber-Physical System (CPS), vibration frequency monitoring, and VISTARION.
CPS · DIGITAL TWIN
Cyber-Physical System (CPS)
Turn tool state into readable data.
- Digital Twin
- Digital Twin
VIBRATION
Vibration frequency monitoring
- Vibration frequency monitoring
- Spindle / Chuck Spin
VISTARION
VISTARION
Industrial AI monitoring interface
- Arm position check
- Arm Position Check
- Wafer on Chuck status
- Wafer on Chuck status
- Thermal image monitor
- Thermal Image Monitor
Chamber field and wafer-surface temperature distribution · Plumbing leakage monitoring